Surface roughness parameters (in the spatial frequency range 0.5 - 256 µm-1) of the three analyzed films: the root mean square height (rms roughness) Sq, the maximum surface peak height Sp and maximum surface valley depth Sv.

Table 1: Surface roughness parameters (in the spatial frequency range 0.5-256 µm^-1) of the three analyzed films: The root mean square height (rms roughness) S_q, the maximum surface peak height S_p and maximum surface valley depth S_v.

Surface roughness parameters (in nm)
Phthalocyanine films	S_q	S_p	S_v
Pc	1.8 ± 0.2	13.2 ± 1.1	-5.3 ± 0.4
FePc	3.9 ± 0.3	13.5 ± 1.2	-12.5 ± 1.2
CoPc	4.1 ± 0.3	42.0 ± 2.7	-14.9 ± 1.2